Lecture

Thermal Evaporation Process

In course

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Description

This lecture covers the thermal evaporation process in a vacuum chamber, where different materials are evaporated onto a wafer surface for micro-nano fabrication. It explains the setup, material selection, deposition control using a mechanical shutter, and the role of the electron beam in heating the evaporant. The process involves loading wafers, achieving vacuum conditions, heating the evaporant, controlling the deposition rate, and unloading the coated wafers.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_jy5o9iwu

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Ontological neighbourhood

Chemical engineering

Materials science: Thin film

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