Etch Stop TechniquesExplores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Ion Beam EtchingIntroduces ion beam etchers, combining physical sputtering with chemical activity.
Wet Etching: Glass and SiliconExplores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
