Lecture

FIB Applications: Nanofabrication and Failure Analysis

In course

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Description

This lecture covers the applications of Focused Ion Beam (FIB) technology in nanofabrication and failure analysis, including topics such as milling, sputtering yield, gas-assisted deposition, and TEM sample preparation. It also explores the use of FIB for manufacturing AFM tips, cross-sectioning samples, and creating nanofabricated structures. The instructor discusses the challenges and techniques involved in FIB-based TEM specimen preparation, emphasizing the importance of artifact prevention and precise lamella positioning for 3D microscopy.

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Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_p409gyv0

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Ontological neighbourhood

Chemical engineering

Materials science: Thin film

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