Explores the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies, covering topics like metal microstructure creation and sputtering efficiency.
Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.
