Micro and Nanofabrication for Optomechanics

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Related lectures (32)

Page 2 of 4

Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Lithography: Fabrication Extended

Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Lithography: Tools and Techniques

Covers the principles and tools used in lithography for micro and nanofabrication.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Lithography: Nanoscale Patterning Techniques

Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.