Chemical Vapor Deposition: Oxide Formation and ALD

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Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Fabrication extended: Deposition

Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.

Thin Films: Growth and Interfaces

Explores dislocation motion, thin film growth models, and interface nature in modern technology.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Thin Films: Deposition and Patterning

Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.

Sputtering: Film Growth and Control Parameters

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.

Physical Vapor Deposition: Principles and Applications

Explores the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies, covering topics like metal microstructure creation and sputtering efficiency.