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Lecture
Micro and Nanofabrication: Basics and Techniques
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Lithography: Microfabrication Technologies
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Micro and Nanofabrication for Optomechanics
Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.
Microfabrication Technologies
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Nanofabrication: Techniques and Challenges
Explores nanofabrication techniques, challenges, and the use of silicon wafers.
Micro/Nanomechanical Devices: Fabrication Techniques
Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.
Lithography: General Concepts and Mask Fabrication
Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.
Advanced Nanomanufacturing: Lithography & Self-Assembly
Delves into advanced nanomanufacturing techniques, including lithography and block copolymer self-assembly for precise device fabrication.
Micro and Nanofabrication
Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.
Lithography: Fabrication Extended
Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.
Lithography: Nanoscale Patterning Techniques
Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.