Lecture
Dry etching: fundamentals and applications
Related lectures (26)
Fabrication extended: Etching
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Industrial Plasmas: Sheath Formation and Plasma Etching
Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.
Ion Beam EtchingMOOC: Micro and Nanofabrication (MEMS)
Introduces ion beam etchers, combining physical sputtering with chemical activity.
Glass Microfabrication by Wet Etching
Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.
Dry Etching TechniquesMOOC: Micro and Nanofabrication (MEMS)
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Plasma Physics: Sheaths and EtchingMOOC: Plasma Physics: Introduction
Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.
Dry Etching: Techniques and EquipmentMOOC: Micro and Nanofabrication (MEMS)
Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.
Industrial Plasmas: Sheath Formation and Plasma Etching
Explores sheath formation, plasma etching, AC plasma processing, and ozone production.
Micro and Nanofabrication
Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.
Sheaths and Plasma EtchingMOOC: Plasma Physics: Introduction
Explores sheaths, ion flux, Bohm criterion, and plasma etching concepts.