Publications by Silviu Cosmin Sandu

Electrical transport properties of Ru1-xTixO2 films deposited by magnetron sputtering technique

The optical and electrical properties of Ru1-xTixO2 (0

PERGAMON-ELSEVIER SCIENCE LTD2021

Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

Paul Muralt, Robin Nigon, Thomas La Grange, Silviu Cosmin Sandu, Mohammad Fazel Parsapour Kolour, Lukas Riemer, Xiao Di

Sputter deposited A1ScN films with an Sc content of 38 at % were investigated by X-ray diffraction and electron microscopy to study the influence of the radio frequency (RF) bias on the growth of abnormally oriented grains (AOG). Scanning electron microsco ...

2020

Low resistivity Ru1-xTixO2 thin films deposited by hybrid high-power impulse magnetron sputtering and direct current magnetron sputtering technique

Alireza Karimi, Arnaud Magrez, Rosendo Sanjines, Silviu Cosmin Sandu

The present paper reports on an experimental investigation of the structural, electrical and optical properties of Ru rich Ru1-xTixO2 thin films. Rutile single-phaseRu(1-x)Ti(x)O(2) thin films have been deposited by reactive hybrid High-power impulse magne ...

2019

Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces

Paul Muralt, Ramin Matloub Aghdam, Thomas La Grange, Silviu Cosmin Sandu, Stefan Mertin, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko

Sputter deposited Al(1-x)ScxN thin films with a Sc content from x = 0 to 43 at% are investigated by electron microscopy in order to study and explain the formation and growth of abnormally oriented grains (AOG). It is found that the latter did not nucleate ...

Wiley-VCH Verlag2019

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Paul Muralt, Thomas La Grange, Silviu Cosmin Sandu, Mohammad Fazel Parsapour Kolour, Vladimir Pashchenko, Kaoru Yamashita

Accurate property determination of the piezoelectric thin film material Al(1-x)Sc(x)N is necessary for designing the next generation of radio frequency resonators in mobile communication, and for testing results of ab initio calculations. Sound velocity an ...

WILEY2019

Combinatorial study of low-refractive Mg-F-Si-O nano-composites deposited by magnetron co-sputtering from compound targets

Jean-Louis Scartezzini, Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin

2018

Structural, tribo-mechanical, and thermal properties of NbAlN coatings with various Al contents deposited by DC reactive magnetron sputtering

Silviu Cosmin Sandu

DC reactive magnetron sputtered Nb2AlyNx coatings with various Al contents (y/(y + z)) ranging from 0 to 0.75 were deposited using different ratios of the currents applied to the Al and Nb targets in order to systematically control their chemical compositi ...

Elsevier Science Sa2017

Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates

Paul Muralt, Silviu Cosmin Sandu, Stefan Mertin, Vladimir Pashchenko, Mohammad Fazel Parsapour Kolour

It is more difficult to nucleate AlN-ScN alloy thin films (AlScN) in pure (0001)-texture than it is with pure AlN thin films. AlN thus can serve as seed layer for AlScN. Equipment limitations may lead to the problem of a vacuum break between AlN and AlScN ...

Ieee2017

Nanoscale Defect Engineering and the Resulting Effects on Domain Wall Dynamics in Ferroelectric Thin Films

Nava Setter, Dragan Damjanovic, Silviu Cosmin Sandu, Ludwig Feigl

Defect engineering is one of the cornerstones of the modern electronics industry. Almost all electronic devices include materials that have been doped by ion bombardment. For materials where crystallinity is essential, such as ferroelectrics, defect type a ...

Wiley-Blackwell2017

Enhanced piezoelectric properties of c-axis textured aluminium scandium nitride thin films with high scandium content: influence of intrinsic stress and sputtering parameters

Paul Muralt, Gabriel Christmann, Stefan Mertin, Silviu Cosmin Sandu, Vladimir Pashchenko, Clemens Benedict Nyffeler, Mohammad Fazel Parsapour Kolour

Aluminium scandium nitride (ASN) exhibits a largely enhanced piezoelectric response as compared to aluminium nitride (AlN), which makes it an upcoming piezoelectric material for use in next generation RF filters, sensors, actuators and energy harvesting de ...

Ieee2017