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Publication
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Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Harald Brune, Stefano Rusponi, Luca Gragnaniello, Fabian Paschke
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