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Dielectric Elastomer Actuators for Microfluidics

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3D Integration Technology for Lab-on-a-Chip Applications

Yüksel Temiz

This study adds a new dimension to lab-on-a-chip systems by employing three-dimensional (3D) integration technology for improved performance, higher functionality, and on-chip computational power. Despite the extensive amount of current research on 3D memo ...

EPFL2012

Pump it up

Herbert Shea, Samuel Rosset, Luc Maffli

We report on the use of zipping actuation applied to dielectric elastomer actuators to microfabricate mm-sized pumps. The zipping actuators presented here use electrostatic attraction to deform an elastomeric membrane by pulling it into contact with a rigi ...

SPIE2012

Optical Modulators Based on Microfabricated Tilting Flaps Operating at low Actuation Voltages

Fabio Jutzi

In this thesis the concept, modelling, design, fabrication process and characterization of novel optical modulators are presented. The devices consist of flaps exhibiting a large tilt with electrostatic actuation at low voltages. The applications comprise, ...

EPFL2012

Elastomer Composites for Actuator Applications

Martin Molberg

Dielectric elastomers are highly promising as functional materials for the rapidly developing field of flexible actuator and generator technology. They offer a unique combination of low densities and large reversible deformations of up to more than 100% in ...

EPFL2010

Reliable MEMS Actuators for Driving Large Microsystems

Nicolas Bernard Golay

Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...

EPFL2010

Micromirrors for integrated tunable mid-infrared detectors and emitters

Niels Quack

The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...

ETH2009

Copper / low-k technological platform for the fabrication of high quality factor above-IC passive devices

Modern communication devices demand challenging specifications in terms of miniaturization, performance, power consumption and cost. Every new generation of radio frequency integrated circuits (RF-ICs) offer better functionality at reduced size, power cons ...

EPFL2007

Nanostencil lithography for nanowire patterning

Jürgen Brugger, Marc Antonius Friedrich van den Boogaart

Stencil lithography is an innovative method for patterning that has a great flexibility from many points of view. It is based on shadow mask evaporation using thin silicon nitride membranes that allow the patterning of sub-100 nm features up to 100 μm in a ...

2006

Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes

Nico de Rooij, Herbert Shea, Samuel Rosset

We report on the first successfully microfabricated and tested ion-implanted dielectric electroactive polymer (EAP or DEAP) actuators. Dieletric EAP (DEAP) actuators combine exceptionally high energy-density with large amplitude displacements [1,2]. Scalin ...

2006

Combined Al-protection and HF-vapour release process for ultrathin cantilevers

Jürgen Brugger, Giovanni Boero, Schahrazede-Lila Mouaziz

Cantilever-based detection of ultrasmall forces is of great interest for several applications such as magnetic resonance force miscroscopy (MRFM) where an ultrahigh sensitive cantilever is used to detect magnetic resonance in small ensembles of electron or ...

2005