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Deep-ultraviolet-microelectromechanicaI systems stencils for high-throughput resistless. patterning of mesoscopic structures

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Deep-ultraviolet-microelectromechanicaI systems stencils for high-throughput resistless. patterning of mesoscopic structures

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Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

Fabrication of functional structures on thin silicon nitride membranes

Full wafer size micro/nanostencil with multiple length-scale apertures

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Polymer microfluidic chips for electrochemical and biochemical analyses

Optical investigation of micrometer and nanometer-size individual GaN pillars fabricated by reactive ion etching

Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size

Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

Piezoelectric acoustic sensors and ultrasonic transducers based on textured PZT thin films

Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size

90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

Optical investigation of micrometer and nanometer-size individual GaN pillars fabricated by reactive ion etching

Fabrication of functional structures on thin silicon nitride membranes

Full wafer size micro/nanostencil with multiple length-scale apertures

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Polymer microfluidic chips for electrochemical and biochemical analyses