Extreme ultraviolet lithographyExtreme ultraviolet lithography (also known as EUV or EUVL) is an optical lithography technology used in semiconductor device fabrication to make integrated circuits (ICs). It uses extreme ultraviolet (EUV) wavelengths near 13.5 nm, using a laser-pulsed tin (Sn) droplet plasma (Sn ions in the ionic states from Sn IX to Sn XIV give photon emission spectral peaks around 13.5 nm from 4p64dn - 4p54dn+1 + 4dn-14f ionic state transitions.), to produce a pattern by using a reflective photomask to expose a substrate covered by photoresist.
Ion beamAn ion beam is a type of charged particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries. A variety of ion beam sources exists, some derived from the mercury vapor thrusters developed by NASA in the 1960s. The most common ion beams are of singly-charged ions. Ion current density is typically measured in mA/cm^2, and ion energy in eV.
Beam (structure)A beam is a structural element that primarily resists loads applied laterally to the beam's axis (an element designed to carry primarily axial load would be a strut or column). Its mode of deflection is primarily by bending. The loads applied to the beam result in reaction forces at the beam's support points. The total effect of all the forces acting on the beam is to produce shear forces and bending moments within the beams, that in turn induce internal stresses, strains and deflections of the beam.
Secondary ion mass spectrometrySecondary-ion mass spectrometry (SIMS) is a technique used to analyze the composition of solid surfaces and thin films by sputtering the surface of the specimen with a focused primary ion beam and collecting and analyzing ejected secondary ions. The mass/charge ratios of these secondary ions are measured with a mass spectrometer to determine the elemental, isotopic, or molecular composition of the surface to a depth of 1 to 2 nm.
Larmor precessionIn physics, Larmor precession (named after Joseph Larmor) is the precession of the magnetic moment of an object about an external magnetic field. The phenomenon is conceptually similar to the precession of a tilted classical gyroscope in an external torque-exerting gravitational field. Objects with a magnetic moment also have angular momentum and effective internal electric current proportional to their angular momentum; these include electrons, protons, other fermions, many atomic and nuclear systems, as well as classical macroscopic systems.
Phosphoric acidPhosphoric acid (orthophosphoric acid, monophosphoric acid or phosphoric(V) acid) is a colorless, odorless phosphorus-containing solid, and inorganic compound with the chemical formula . It is commonly encountered as an 85% aqueous solution, which is a colourless, odourless, and non-volatile syrupy liquid. It is a major industrial chemical, being a component of many fertilizers. The compound is an acid. Removal of all three ions gives the phosphate ion .
Ion sourceAn ion source is a device that creates atomic and molecular ions. Ion sources are used to form ions for mass spectrometers, optical emission spectrometers, particle accelerators, ion implanters and ion engines. Electron ionization Electron ionization is widely used in mass spectrometry, particularly for organic molecules. The gas phase reaction producing electron ionization is M{} + e^- -> M^{+\bullet}{} + 2e^- where M is the atom or molecule being ionized, e^- is the electron, and M^{+\bullet} is the resulting ion.
TireA tire (North American English) or tyre (Commonwealth English except Canada) is a ring-shaped component that surrounds a wheel's rim to transfer a vehicle's load from the axle through the wheel to the ground and to provide traction on the surface over which the wheel travels. Most tires, such as those for automobiles and bicycles, are pneumatically inflated structures, which also provide a flexible cushion that absorbs shock as the tire rolls over rough features on the surface.
Bending momentIn solid mechanics, a bending moment is the reaction induced in a structural element when an external force or moment is applied to the element, causing the element to bend. The most common or simplest structural element subjected to bending moments is the beam. The diagram shows a beam which is simply supported (free to rotate and therefore lacking bending moments) at both ends; the ends can only react to the shear loads. Other beams can have both ends fixed (known as encastre beam); therefore each end support has both bending moments and shear reaction loads.
Rolling resistanceRolling resistance, sometimes called rolling friction or rolling drag, is the force resisting the motion when a body (such as a ball, tire, or wheel) rolls on a surface. It is mainly caused by non-elastic effects; that is, not all the energy needed for deformation (or movement) of the wheel, roadbed, etc., is recovered when the pressure is removed. Two forms of this are hysteresis losses (see below), and permanent (plastic) deformation of the object or the surface (e.g. soil).
