Concept

Stepper

Publications associées (77)

Micromachining of Hafnium Carbide

During this project, the microfabrication of Hafnium Carbide (HfC) was investigated. Multiple tools were considered and tested for their compatibility and effectiveness when working with HfC. The main method of choice for the machining of HfC thin films wa ...

2023

PET REBINNING WITH REGULARIZED DENSITY SPLINES

Michaël Unser

PET reconstruction algorithms have long relied on sinogram rebinning. However, as detectors grow smaller in a recent wave of cutting-edge scanners, individual sensors no longer accrue hundreds of photons. Instead, most detect a single photon or none at all ...

New York2023

FEM simulation: Thermal properties of thin film quartz and silicon resonators

This semester project aimed at simulating two approaches for low temperature dependence of resonance frequency of resonators. The first one consists in using AT-cut quartz as the resonator’s material. The AT-cut quartz wafers are made using a 35° angle wit ...

2021

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

A high-power LED-based illumination system has been developed as a replacement for the mercury arc lamps used in mask-aligner lithography. LEDs are arranged in a grid array and placed in the entrance aperture of individual reflectors. Those reflectors decr ...

SPIE2019

On Advanced Large-Field Photolithography

Raoul Kirner

The information age we live in today relies on highly integrated devices. They are fabricated with the help of photolithography, the patterning technique at the heart of their production. With the continuous demand for higher integration density to achieve ...

EPFL2019

Optical-stack optimization for improved SPAD photon detection efficiency

Edoardo Charbon, Claudio Bruschini, Ivan Michel Antolovic, Ekin Kizilkan, Rolando Ferrini, Arin Can Ülkü, Scott Anthony Lindner, Marc Schnieper, Frédéric Zanella

Single-photon avalanche diodes (SPADs) are direct photon-to-digital detectors that enable scalable arrays with Poisson-limited signal-to-noise ratio and picosecond timing resolution. However, SPAD detectors require a guard-ring structure to prevent lateral ...

2019

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

Toralf Scharf, Wilfried Noell, Chen Yan, Raoul Kirner, Andreas Vetter

In proximity mask aligner photolithography, diffraction of light at the mask pattern is the predominant source for image shape distortions such as line end shortening and corner rounding. One established method to mitigate the impact of diffraction is opti ...

2019

Wafer-scale MOCVD growth of monolayer MoS2 on sapphire and SiO2

Aleksandra Radenovic, Andras Kis, Ke Liu, Michal Daniel Macha, Yanfei Zhao, Hokwon Kim, Huanyao Cun

High-quality and large-scale growth of monolayer molybdenum disulfide (MoS2) has caught intensive attention because of its potential in many applications due to unique electronic properties. Here, we report the wafer-scale growth of high-quality monolayer ...

2019

Gold nano-mesh synthesis by continuous-flow X-ray irradiation

Giorgio Margaritondo, Ying Chen

X-ray irradiation has been extensively used in recent years as a fabrication step for nanoparticles and nanoparticle systems. A variant of this technique, continuous-flow X-ray irradiation, has recently been developed, and offers three important advantages ...

INT UNION CRYSTALLOGRAPHY2019

Gold nano-mesh synthesis by continuous-flow X-ray irradiation

Giorgio Margaritondo, Ying Chen

2019

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