Industrie des semi-conducteurs

L'industrie des semi-conducteurs est un secteur industriel qui regroupe les activités de conception, de fabrication et de commercialisation des semi-conducteurs. Ces activités participent de manière fondamentale à la production de biens et de services des technologies de l'information et de la communication dans la mesure où elles fournissent le composant de base de ces technologies : le circuit intégré. Par exemple, ce composant est au cœur des serveurs informatiques, des routeurs de réseaux de transport de données et des terminaux téléphoniques. Notes et références Semi-conducteurs

From All-Si Nanowire TFETs Towards III-V TFETs

Hesham Ghoneim

Performance improvement by device scaling has been the prevailing method in the semiconductor industry over the past four decades. However, current silicon transistor technology is approaching a fundamental limit where scaling does not improve device performance. As the density of number of devices increases a rise in dynamic and especially static power dissipation is ever more present, making this the biggest issue in microelectronics today. Planar silicon devices are therefore already being replaced by multiple-gate architectures and will be replaced by new channel materials and new switching mechanisms during the next 10 years. A means to decrease the threshold and supply voltage and, therefore minimizing power dissipation, is to employ devices which exhibit a steeper slope than the MOSFET limit of 60 mV/dec at room temperature. The Tunnel FET promises steep turn-on characteristics and low leakage currents as compared to MOSFETs which make it attractive for low-power operation. A great deal of work over the past years has been done to boost device performance of Tunnel FETs by combining ultimate wrap-gate architectures, incorporation of III/V materials and band engineering for hetero-tunnel junctions. The latter is seen as an ideal route towards achieving high drive currents and steep sub-threshold slopes at low supply voltages. This thesis investigates both Si Tunnel FETs and the route towards heterostructure Tunnel FETs, but also the technological challenges to achieve these device structures. The first part of this work deals with vapor-liquid-solid grown silicon in-situ doped n+-i-p nanowire Tunnel FETs in a lateral geometry, where the influence of the gate dielectric, i.e., SiO2 or HfO2, on device performance is investigated along with the study of low-temperature behavior. The devices having the strongest gate coupling due to the high-κ gate oxide HfO2 are shown to exhibit the best device performance as compared with the SiO2 gate stack. A vertical process for Si FETs is developed and improved to obtain a fully wrap-gate geometry. It is adaptable to different material systems and is the basis for the ongoing work on InAs-on-Si nanowire Tunnel FETs. Improved performance for these heterostructure devices requires in particular high doping concentrations as well as abrupt doping profiles to achieve high tunnel currents. Therefore, the second part focuses on the InAs material system and specifically the study of dopant incorporation. Doping is done in-situ using different precursors during growth. The InAs nanowires are grown in SiO2 mask openings on 〈111〉 Si substrates in a metal-organic vapor phase epitaxy process. The effect of the dopants and growth parameters on radial and vertical growth rates, wire morphology and resistivity is investigated. A method utilizing the measured Seebeck coefficient of the InAs nanowires to extract doping densities without the need of assuming a mobility value is presented. Two other reference methods where I-V characteristics of homo-and heterojunction InAs tunnel diodes are fitted by TCAD simulations confirm this approach. Doping densities ranging from 1·1017 cm−3 to 7.1·1019 cm−3 were achieved which is comparable to the highest doping concentration reported in bulk InAs. Furthermore, single vertical pn+-junctions are fabricated by growing n-type InAs nanowires on p-type InAs substrates, which show high tunnel current densities of 500 kA/cm2 at 0.3 V reverse bias. In the forward direction, negative differential resistance is obtained below 200 K, which is the characteristic feature of an Esaki diode.

EPFL2012

Selective area epitaxy of GaAs: the unintuitive role of feature size and pitch

Akshay Balgarkashi, Elif Nur Dayi, Didem Dede, Anna Fontcuberta i Morral, Martin George Friedl, Lucas Güniat, Nicholas Paul Morgan, Valerio Piazza

Selective area epitaxy (SAE) provides the path for scalable fabrication of semiconductor nanostructures in a device-compatible configuration. In the current paradigm, SAE is understood as localized epitaxy, and is modelled by combining planar and self-assembled nanowire growth mechanisms. Here we use GaAs SAE as a model system to provide a different perspective. First, we provide evidence of the significant impact of the annealing stage in the calculation of the growth rates. Then, by elucidating the effect of geometrical constraints on the growth of the semiconductor crystal, we demonstrate the role of adatom desorption and resorption beyond the direct-impingement and diffusion-limited regime. Our theoretical model explains the effect of these constraints on the growth, and in particular why the SAE growth rate is highly sensitive to the pattern geometry. Finally, the disagreement of the model at the largest pitch points to non-negligible multiple adatom recycling between patterned features. Overall, our findings point out the importance of considering adatom diffusion, adsorption and desorption dynamics in designing the SAE pattern to create pre-determined nanoscale structures across a wafer. These results are fundamental for the SAE process to become viable in the semiconductor industry.

IOP Publishing Ltd2022

Self-Heating Aware Design of ICs in Deep Sub-Micron FDSOI and Bulk Technologies

Can Baltaci

Bulk CMOS technologies left the semiconductor market to the novel device geometries such as FDSOI and FinFET below 30 nm, mainly due to their insufficient electrical characteristics arising from different physical limitations. These innovative solutions enabled the ongoing device scaling to continue. However, the threshold voltage and the power supply values did not shrink with the device sizes, which caused an excessive amount of heat generation in very small dimensions. With the high thermal resistivity materials used in FDSOI and FinFET, the generated heat cannot leave the device easily, which is not the case in bulk. With all of these, modern geometries brought a major problem, which is the self-heating. Due to self-heating effects (SHE), the temperature of a device rises significantly compared to its surroundings. Having very large local temperature brings important reliability issues. Moreover, the electrical behaviour of a device also changes dramatically when its temperature is very large. These facts bring the need of considering SHE and the temperature of each device separately. Nevertheless, in many of today's CAD tools, a single global temperature is applied to all of the devices. Even if some advanced simulation options are used, estimating the temperature of a device is not a simple task as it depends on many parameters. The focus of this thesis is to show the significance of SHE in the design of ICs and provide self-heating aware design guidelines. In order to achieve this, different circuit implementations are studied by considering the SHE. The study consists of two main parts, which are the reliability of the high-speed digital circuits and the performance of analog blocks where noise is critical. Moreover, detailed device-level electro-thermal simulations are performed to explain the self-heating phenomena more in detail and to perform a comparison between bulk and FDSOI. The digital part of the self-heating study is performed on two very high-speed full-custom 64-bit Kogge-Stone adders in 40 nm and 28 nm technologies. Thermal simulations are performed on these blocks to compare SHE in bulk and FDSOI geometries. The comparison of two implementations also provides the increasing significance of SHE with scaling. Extensive heating analyses are performed to find the most critical devices that are the primary heat generators. Design guidelines and solutions are proposed to flatten the temperature profiles in precharged and static logic implementations and to decrease the probability of electromigration. The analog study of the work focuses on the thermal noise performance of LNAs and SHE on the flicker noise. Since thermal noise of a device linearly depends on the temperature, it is directly affected by SHE. To show the amount of SHE on the noise figure, three common gate cascode LNAs operating at 2 GHz with different device lengths are implemented in 28 nm FDSOI. The measurements show that the self-heating effects are clearly observed on the noise figure and the performance of the blocks deviate importantly from the simulations. Moreover, the self-heating effects are significantly more in short channel devices due to their large heat density. Similar experiments are also performed on different test structures in FDSOI at lower frequencies to observe SHE on flicker noise. The experiments show that flicker noise degrades at larger temperatures and more in short channel implementations.