Publications de Cyrille Hibert

All-stencil transistor fabrication on 3D silicon substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Cyrille Hibert, Philippe Langlet, Cristina Martin Olmos, Oscar Vazquez Mena, Katrin Sidler Arnet, Peter Vettiger

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Iop Publishing Ltd2012

Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

Cyrille Hibert, Sven Holmström, Sertan Kutal Gökce, David Bowman

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in pl ...

Institute of Electrical and Electronics Engineers2011

High aspect ratio sub-micron trenches on silicon-on-insulator and bulk silicon

Mihai Adrian Ionescu, Cyrille Hibert, Daniel Grogg, Marion Hermersdorf

This paper reports on the fabrication of sub-micron trenches on silicon-on-insulator (SOI) required in many MEMS devices and on bulk silicon. Trenches in the range of 100-500 nm had been etched with the deep reactive ion etching (DRIE) by using the SHARP ( ...

2011

Direct Etching of High Aspect structures through a Stencil

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cyrille Hibert, Oscar Vazquez Mena

2009

Fluorine based plasma treatment of biocompatible silicone elastomer. Effect of temperature on etch rate and surface properties

Arnaud Bertsch, Cyrille Hibert

This paper describes F-based dry etching and resulting surface properties of biocompatible silicone elastomer. The etch rate of polysiloxane and surface morphology was found to be highly temperature dependent. An increase in temperature results in a signif ...

2008

Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro- /nanopatterns on surfaces

Jürgen Brugger, Cyrille Hibert, Marc Antonius Friedrich van den Boogaart, Sivashankar Krishnamoorthy

Wiley2008

Tunable, high aspect ratio pillars on diverse substrates using copolymer micelle lithography: an interesting platform for applications

Jürgen Brugger, Cyrille Hibert, Sivashankar Krishnamoorthy

We demonstrate the use of copolymer micelle lithography using polystyrene-block-poly(2-vinylpyridine) reverse micelle thin films in their as-coated form to create nanopillars with tunable dimensions and spacing, on different substrates such as silicon, sil ...

2008

High Quality Factor Copper Inductors Integrated in Deep Dry Etched Quartz Substrates

Mihai Adrian Ionescu, Didier Bouvet, Cyrille Hibert, Christine Leroy

2007

Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps

Mihai Adrian Ionescu, Cyrille Hibert, Marco Mazza, Nicoleta-Diana Ciressan

2007

Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications

Philippe Renaud, Cyrille Hibert, Philippe Flückiger, Roland Guerre

This paper presents a novel technological and design study of optical guided- wave MicroElectroMechanical Systems (MEMS) switch. We work on a concept of hermetic assembly in which a MEMS wafer is covered (top-down) by a crossing optical waveguide wafer. Th ...

2005