A high fill-factor, dual-axis micromirror array with novel spring and actuator design is developed for high thermal load applications. Each pixel can attain an omnidirectional mechanical DC rotation angle of +/- 4 degrees.
Christophe Moser, Volker Günter Zagolla, Damien Claude-Marie Loterie
Christophe Moser, Eric Tremblay, Volker Günter Zagolla
Jamie Paik, Zhenishbek Zhakypov, Jian-Lin Huang, Ralph Spolenak