Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level
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In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr,Ti)O-3 thin film ...
The piezoelectric properties of rhombohedral relaxor-ferroelectric compositions close to morphotropic phase boundary have been studied as a function of temperature. As they exhibit, upon heating, a rhombohedral to tetragonal phase transition the piezoelect ...
The fabrication and characterization of a microfabricated acoustic Lamb-wave device driven by a piezoelectric PZT (modified lead zirconate titanate Pb(Zr-x,Ti1-x)O-3) sol-gel thin film for use in mass-transport, mass-filtering and fluid-delivery systems ar ...
Ultrasonic motors for low electrical power applications are considered for portable devices such as an electronic wristwatch. For the study of a standing wave type motor, a modular approach was proposed, where stators and rotors are added in an assembly st ...
Two W protection schemes for direct-contact bottom electrodes for PZT thin films, namely RuO2/Cr and RuO2/Ru, were compared with respect to protective performance and contact resistance up to 800 degrees C annealing temperature in oxygen. Cr clearly offers ...
The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...
The effective piezoelectric transverse coefficient e(31,f) was measured on various lead zirconate-titanate (PZT) and aluminum nitride thin films. The measurement set-up is based on the collection of the electric charges created by the forced deflection of ...
The effects of donor (Nb, Ta) and acceptor (Na, Mg, Fe) dopants on the crystallization mechanism of PZT thin films were investigated. The parameters which control microstructure development were found to be different for donors and accepters. Lead stoichio ...
The shape of the grains and the granulometry distribution of the PZT powder are the main factor influencing the densification. In addition, we shown that a higher concentration of PZT powder in the ink with a right rheology of the ink improves the density ...
Fatigued state of the Pt-PZT-Pt system is studied by means of low-temperature conduction measurements. It is shown that the conduction in the temperature interval of 100-140 degrees K is determined by the cold field emission of electrons (tunneling conduct ...
