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Vibrational piezoelectric energy harvesters based on thinned bulk PZT sheets fabricated at the wafer level

Publications associées (78)

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Thin film pyroelectric arrays as infra-red detectors

Paul Muralt, Andreas Seifert

Pyroelectric thin film 12-element linear arrays (element size 0.4x0.9 mm(2)) have been fabricated by standard photolithography techniques on silicon substrates. A voltage responsivity of almost 800 V/W in air and 3000 V/W in vacuum is measured at low frequ ...

1997

Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

PZT thin films for micro sensors and actuators

Paul Muralt

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...

1996

Sol-gel deposition of PZT thin films on ceramic ZrO2 substrates

Nava Setter, Paul Muralt, Thomas Maeder

Pb(Zr1–xTix)O3 thin films (x = 0.55 and 0.85) were prepared on fine grained, polished ZrO2 ceramic substrates by a sol-gel method. The high thermal expansion of ZrO2 relative to Si allows the preparation of thicker PZT films with reduced thermal stress. Fo ...

IEEE1996

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Nico de Rooij, Nava Setter, Philippe Renaud, Georges-André Racine

The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflect ...

1996

Design of a novel thin-film piezoelectric accelerometer

Nava Setter, Paul Muralt

A novel piezoelectric thin-film accelerometer has been designed and its performance has been analysed. The piezoelectric thin film (PZT for example) is delineated into an array of pads to reduce the sensor capacitance. By filling the cavity around the PZT ...

1996

Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Paul Muralt, Thomas Maeder

The piezoelectric response of silicon diaphragms covered with sputter-deposited PbZr0.45Ti0.55O3 (PZT) films has been investigated in view of their application in ultrasonic micro-actuators. The behaviour of resonance frequencies and quasistatic deflection ...

Elsevier1996

PZT films for micro-pumps

Nava Setter, Dragan Damjanovic, Georges-André Racine

A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...

1995

Fabrication and characterization of PZT thin films for micromotors

Paul Muralt, Roland Luthier, Thomas Maeder

Piezoelectric membranes consisting of PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The PZT films were deposited by sputtering and sol gel techniques. Resonance amplitudes of up to 1000 nm/V ...

Taylor & Francis1995

Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications

Nava Setter, Paul Muralt, Thomas Maeder

For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995