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A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Publications associées (84)

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We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well ...

IEEE2020

5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Victor Plessky, Bruno Garcia

Microacoustic resonators made on suspended continuous membranes of LiNbO3 were recently shown to have very strong coupling and low losses at >= 5 GHz, suitable for high-performance filter design. Employing these simple resonator structures, the authors hav ...

INST ENGINEERING TECHNOLOGY-IET2019

Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Davide Sacchetto, Yusuf Leblebici, Oliver Peric, Zuhal Tasdemir

A monolithic process is developed for the fabrication of Si nanowires within thick Si substrates. A combination of anisotropic etch and sidewall passivation is utilized to protect and release Si lines during the subsequent deep etch. An etch depth of 10 mu ...

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC2018

Top-Down Technique for Scaling toNnano in Silicon MEMS

Yusuf Leblebici, Zuhal Tasdemir, Mustafa Yilmaz, Yasin Kilinc

Nanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example high ...

American Vacuum Society2017

Fabrication of 2d Material Based Resonators

Tom Larsen, An Tran

Improvements in manufacturing processes inspired by the semiconductor integrated circuit industry have seen a sharp reduction in dimensions of microelectromechanical systems (MEMS), leading to the emergence of its submicron counterpart – nanoelectromechani ...

2017

Multi-scale integration remains the primary challenge in the fabrication of miniature piezoresistive sensors, as the co-fabrication of a silicon nanowire along with a microscale shuttle is the main architecture facilitating high-sensitivity transduction. T ...

Institute of Electrical and Electronics Engineers2017

Piezoresistivity characterization of silicon nanowires through monolithic MEMS

Yusuf Leblebici, Mohammad Nasr Esfahani

This paper presents a monolithic approach for the integration of silicon nanowires (Si NWs) with microelectromechanical systems (MEMS). The process is demonstrated for the case of co-fabrication of Si NWs with a 10-μm-thick MEMS on the same silicon-on-insu ...

2017

Robustness Analysis of Controllable-Polarity Silicon Nanowire Devices and Circuits

Hassan Ghasemzadeh Mohammadi

Substantial downscaling of the feature size in current CMOS technology has confronted digital designers with serious challenges including short channel effect and high amount of leakage power. To address these problems, emerging nano-devices, e.g., Silicon ...

EPFL2016

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Annalisa De Pastina, Pierre-Emmanuel Marie Thiriet

This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O ...

2016

Die Level Release of Silicon Photonic MEMS

Niels Quack, Teodoro Graziosi, Jonas Jacobs

We demonstrate a die level release process for silicon photonic MEMS structures, that is compatible with dies from a standard silicon photonics foundry process which are only several square millimeters in size. ...

IEEE2016