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Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Publications associées (45)

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A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

Yi Zhang, Christophe Marcel Georges Galland

We demonstrated a waveguide crossing for submicron silicon waveguides with average insertion loss of 0.18±0.03 dB and crosstalk of -41±2 dB, uniform across an 8-inch wafer. The device was fabricated in a CMOS-compatible process using 248 nm lithography, wi ...

Institute of Electrical and Electronics Engineers2013

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In off-axis digital holographic microscopy, short coherence length of the source results in an unwanted reduced field of view. A diffractive optical element (DOE) which combines two high efficiency transmission volume phase gratings holographically recorde ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2012

A ratiometric fluorescence sensor for caffeine

Kay Severin, Albert Ruggi, Nicolas Luisier, Nicolas David Gaeng, Laurane Favre

The dye disodium 3,4:3’,4’-bibenzo[b]thiophene-2,2’-disulfonate can be used as molecular probe for the fluorimetric detection of caffeine in aqueous solution. The fluorescence response is attributed to non-covalent interactions of caffeine with the dye in ...

Royal Society of Chemistry2012

Rare earths: jewels for functional materials of the future

Svetlana Eliseeva

In recent decades, rare earths have become vital to a wealth of advanced materials and technologies including catalysts, alloys, magnets, optics and lasers, rechargeable hydride batteries, electronics, economical lighting, wind- and solar-energy conversion ...

2011

Rare earths: jewels for functional materials of the future

Jean-Claude Bünzli, Svetlana Eliseeva

2011

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Dichalcogenides with the common formula MX2 are layered materials with electrical properties that range from semiconducting to superconducting. Here, we describe optimal imaging conditions for the optical detection of ultrathin, two-dimensional dichalcogen ...

Institute of Physics2011

Extended Focus Optical Coherence Microscopy

Martin Villiger

Optical coherence tomography (OCT) is an interferometric imaging technique that can provide depth resolved cross-sectional views of biological tissue. OCT employs light with low temporal and yet high spatial coherence. The sample is illuminated point by po ...

EPFL2010

Optofluidic pressure sensor based on interferometric imaging

Demetri Psaltis, Wuzhou Song

We present a chip-scale optofluidic interferometric sensor for measuring liquid pressure based on an imaging method. The chip was constructed with a polymer by multilayer soft lithography. It consists of a flexible air gap optical cavity, which, upon illum ...

2010

Time-Intensity Superposition for Photoinitiated Polymerization of Fluorinated and Hyperbranched Acrylate Nanocomposites

Sara Dalle Vacche, Valérie Geiser

The validity of the time-intensity superposition principle for the photoinitiated polymerization of nanocomposites based on a monofunctional fluorinated acrylate and on a multifunctional hyperbranched polyether acrylate was investigated in this work. Maste ...

2010

Green Lighting - Energy-Efficient Integrated Lighting Systems

Jean-Louis Scartezzini, Friedrich Linhart

The objective of the Green Lighting project was to develop a High Performance Integrated Lighting System, based on advanced technologies for day- and electric lighting, achieving a Lighting Power Density (LPD) that does not exceed 3 W/m2. The project has r ...

2009