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A planar actuator device, including a base plate including a first, second, and third pair of planar coils, each pair of planar coils having an inner coil and an outer coil, each pair of planar coils arranged along a first, second, and third linear motion axis, respectively, the first, second, and third linear motion axis arranged in a star configuration, and an actuation mechanism including a first, second, and third planar legs and a centerpiece, the first, second and third planar legs pivotably connected to the centerpiece, the planar legs including a first, second, and third sliding element and a first, second, and third middle section, respectively, a sliding element and middle section of a respective leg pivotably connected to each other, each sliding element including a permanent magnet.
Simon Nessim Henein, Charles Baur, Loïc Benoît Tissot-Daguette, Hubert Pierre-Marie Benoît Schneegans, Quentin Gubler
Jamie Paik, Zhenishbek Zhakypov, Jian-Lin Huang, Ralph Spolenak