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Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches

Publications associées (30)

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Dynamic control of high-voltage actuator arrays by light-pattern projection on photoconductive switches

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The ability to control high-voltage actuator arrays relies, to date, on expensive microelectronic processes or on individual wiring of each actuator to a single off-chip high-voltage switch. Here we present an alternative approach that uses on-chip photoco ...

SPRINGERNATURE2023