Lecture
Advanced Nanomanufacturing: Lithography & Self-Assembly
Description
This lecture covers advanced topics in micro- and nanomanufacturing, focusing on lithography techniques like electron beam lithography and focused ion beam fabrication. It also explores the self-assembly of block copolymers for nanoscale patterning, discussing phase separation, neutralization layers, and directed self-assembly methods. The synergy between top-down and bottom-up fabrication approaches is highlighted, emphasizing the potential for high-resolution device fabrication.
Official source
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