Lecture

Electron Beam Lithography: Tool Overview

In course

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Description

This lecture covers electron beam lithography (EBL) focusing on the electron gun brightness, lens aberrations, effective beam diameter, and classical implementation. Topics include the factors affecting probe size, lens aberrations, beam properties, and the classical implementation of EBL tools.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_hpkm415o

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