Lecture
Principle of SIMS
In course
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Description
This lecture covers the principle of Secondary Ion Mass Spectrometry (SIMS), explaining how a surface is sputtered with a primary ion beam to analyze secondary ions with a mass spectrometer. Topics include mass spectrum, depth profile, mass interference, modes of operation, sputtering yield, ionization yield, and examples of SIMS applications.
Instructors (2)
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Official source
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