Lecture

Lithography: Tools and Techniques

In course

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Description

This lecture covers the principles and tools used in lithography for micro and nanofabrication, including UV lithography, alignment and exposure tools, contact and proximity exposure, exposure wavelengths and light sources, projection lithography, resolution enhancement techniques, phase shift masks, and immersion lithography.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_zmu4jz97

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Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

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