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Microtechnology deals with technology whose features have dimensions of the order of one micrometre (one millionth of a metre, or 10−6 metre, or 1μm). It focuses on physical and chemical processes as well as the production or manipulation of structures with one-micrometre magnitude. Around 1970, scientists learned that by arraying large numbers of microscopic transistors on a single chip, microelectronic circuits could be built that dramatically improved performance, functionality, and reliability, all while reducing cost and increasing volume. This development led to the Information Revolution. More recently, scientists have learned that not only electrical devices, but also mechanical devices, may be miniaturized and batch-fabricated, promising the same benefits to the mechanical world as integrated circuit technology has given to the electrical world. While electronics now provide the ‘brains’ for today's advanced systems and products, micro-mechanical devices can provide the sensors and actuators — the eyes and ears, hands and feet — which interface to the outside world. Today, micromechanical devices are the key components in a wide range of products such as automobile airbags, ink-jet printers, blood pressure monitors, and projection display systems. It seems clear that in the not-too-distant future these devices will be as pervasive as electronics. The process has also become more precise, driving the dimensions of the technology down to sub-micrometer range as demonstrated in the case of advanced microelectric circuits that reached below 20 nm. The term MEMS, for Micro Electro Mechanical Systems, was coined in the 1980s to describe new, sophisticated mechanical systems on a chip, such as micro electric motors, resonators, gears, and so on. Today, the term MEMS in practice is used to refer to any microscopic device with a mechanical function, which can be fabricated in a batch process (for example, an array of microscopic gears fabricated on a microchip would be considered a MEMS device but a tiny laser-machined stent or watch component would not).

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Microtechnology

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.

Nanotechnology

Nanotechnology, often shortened to nanotech, is the use of matter on atomic, molecular, and supramolecular scales for industrial purposes. The earliest, widespread description of nanotechnology referred to the particular technological goal of precisely manipulating atoms and molecules for fabrication of macroscale products, also now referred to as molecular nanotechnology. A more generalized description of nanotechnology was subsequently established by the National Nanotechnology Initiative, which defined nanotechnology as the manipulation of matter with at least one dimension sized from 1 to 100 nanometers (nm).

MICRO-443: Conceptual design of products and systems

"Reverse engineering", une activité consistant à étudier un objet pour en déterminer le fonctionnement interne ou la méthode de fabrication. Les étudiants seront capables d'analyser et d'évaluer des p

MSE-805: CCMX Summer School - Characterisation of Materials

This course will present an overview of the different materials characterisation techniques available to materials scientists, engineers in mechanical engineering, chemical engineering, microtechnolog

MICRO-501: MEMS practicals I

Objective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class

MEMS: Advanced Introduction

Covers advanced topics in MEMS technology, including design, packaging, device categories, historical perspective, market trends, and the role of startups.