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Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.
Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
