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Semiconductor fabrication plant

Related publications (357)

Photonic Damascene process for integrated high Q microresonator based nonlinear photonic devices

Chip-based optical waveguides formed by a silicon nitride (Si3N4) core and a silicon dioxide (SiO2) cladding are an important platform for low loss waveguides and nonlinear optics. High Q microresonators based on this material system have become a standard ...

EPFL2018

Fabrication and characterization of silicone-based dielectric elastomer actuators for mechanical stimulation of living cells

Herbert Shea, Samuel Rosset, Alexandre Poulin

Cellular biology is a promising field of application for dielectric elastomer actuators (DEAs) given that large strains are needed but only low forces are required. The development of devices compatible with standard cell culture protocols and equipment is ...

2018

Scalable production of double emulsion drops with thin shells

Esther Amstad, Antoine Claude Jean Vian

Double emulsions are often used as containers to perform high throughput screening assays and as templates for capsules. These applications require double emulsions to be mechanically stable such that they do not coalesce during processing and storage. A p ...

2018

Assessing microlens quality based on 3D irradiance measurement at the focal spot area

Toralf Scharf, Wilfried Noell, Jeremy Béguelin, Michail Symeonidis

During the fabrication process of microlenses, characterization is essential for two purposes: evaluate the optical quality of the element and provide surface information feedback for process optimization. However, no technique can fulfill these two object ...

2018

Development and Characterization of PEDOT:PSS/Alginate Soft Microelectrodes for Application in Neuroprosthetics

Diego Ghezzi, Marc Olivier Heuschkel, Flavio Maurizio Mor, Marta Jole Ildelfonsa Airaghi Leccardi, Laura Ferlauto, Paola Vagni, Estelle Annick Cuttaz

Reducing the mechanical mismatch between the stiffness of a neural implant and the softness of the neural tissue is still an open challenge in neuroprosthetics. The emergence of conductive hydrogels in the last few years has considerably widened the spectr ...

2018

Femtosecond laser assisted 3-dimensional freeform fabrication of metal microstructures in fused silica

Andreas Mortensen, Yves Bellouard, Raphaël Charvet, Fatmah Ebrahim, Cyril Dénéréaz

Femtosecond laser exposure of fused silica combined with chemical etching has opened up new opportunities for three-dimensional freeform processing of micro-structures that can form complex micro-devices of silica, integrating optical, mechanical and/or fl ...

Spie-Int Soc Optical Engineering2017

Fabrication, Characterization and Integration of Resistive Random Access Memories

Jury Sandrini

The functionalities and performances of today's computing systems are increasingly dependent on the memory block. This phenomenon, also referred as the Von Neumann bottleneck, is the main motivation for the research on memory technologies. Despite CMOS tec ...

EPFL2017

Nanoporous silicon tubes: the role of geometry in nanostructure formation and application to light emitting diodes

Anna Fontcuberta i Morral, Heidi Andrea Potts, Luca Francaviglia, Jelena Vukajlovic Plestina, Francesca Amaduzzi

Obtaining light emission from silicon has been the holy grail of optoelectronics over the last few decades. One of the most common methods for obtaining light emission from silicon is to reduce it to a nanoscale structure, for example by producing porous s ...

Institute of Physics2017

In-Plane-Gate GaN Transistors for High-Power RF Applications

Elison de Nazareth Matioli, Giovanni Santoruvo

In-plane-gatefield-effect transistors (IPGFETs) offer an innovative device architecture in which the channel conductivity is modulated by the electric field from the 2D electron gas in the two adjacent in-plane gates, isolated by etched trenches. The plana ...

2017

Fabrication of 2d Material Based Resonators

Tom Larsen, An Tran

Improvements in manufacturing processes inspired by the semiconductor integrated circuit industry have seen a sharp reduction in dimensions of microelectromechanical systems (MEMS), leading to the emergence of its submicron counterpart – nanoelectromechani ...

2017

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