Chemical vapor deposition

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Chemical engineering
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Thin film

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Related lectures (32)

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Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Chemical Vapor Deposition: Fundamentals and Techniques

Covers the fundamentals and techniques of Chemical Vapor Deposition (CVD), including mass transfer, film growth rate calculation, and various CVD techniques.

Thin-Film Processing: Plasma Deposition

Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.

Chemical Vapour Deposition: Thin Films & Oxidation

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Thin Films: Deposition and Growth

Explores thin film preparation, growth mechanisms, organic film considerations, and deposition techniques in electronics.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Chemical Vapor Deposition: Si, SiN4, SiO2, Diamond

Explores LPCVD and PECVD processes for Si, SiN4, SiO2, and diamond in microelectronics applications.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Gas Transport and Film Growth Rate

Covers mass transport in the boundary layer, gas transfer to the substrate, film growth rate calculation, and experimental results.