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Lecture
Physical Vapor Deposition: Evaporation Techniques
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Thin Film Growth: Atoms Arrival and Adhesion
Delves into thin film growth, adhesion, crystal structure, and stresses.
Film Growth: Growth Modes and Crystal Structure
Explores growth modes in film growth and crystal structure determination based on materials used.
Thin-Film Processing: Deposition Techniques
Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.
Thermal Evaporation Process
Explains the thermal evaporation process in a vacuum chamber for micro-nano fabrication.
Sputtering: Ion Target Interactions
Examines ion-target interactions in PVD sputtering processes, covering compound deposition, surface damage, and factors influencing target ejection rates.
Wet Etching: Sacrificial Layers
Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Sputtering: Plasma Formation and Thin Film Deposition
Covers sputtering, plasma creation, and thin film deposition processes.
Snow Processes at Snow-Atmosphere Interface
Explores processes at the snow-atmosphere interface and extreme snow falls in the Swiss Alps.
Chemical Vapor Deposition: Oxide Formation and ALD
Explores CVD processes for oxide formation and ALD in micro and nanofabrication.
Organic Thin Film Growth
Explores organic thin film growth methods, nucleation, grain growth, crystal alignment, and solvent vapor annealing.