Microfabrication Techniques: Inspection and Metrology

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Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Solid Ground Curing: Principles and Examples

Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.

Lithography: Microfabrication Technologies

Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.

Focused Ion Beam: Principles and Applications

Explores the principles and applications of Focused Ion Beam (FIB) technology, including imaging, milling, and 3D microscopy.

Protecting FinFilm in Flexible Probes

Emphasizes protecting FinFilm in flexible probes to maintain device functionality and stability amidst stress and strain.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Micro and Nanofabrication for Optomechanics

Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.

Silicon Etching Techniques

Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.

Focused Ion Beam: Principles and Applications

Explores the principles and applications of Focused Ion Beam technology, including ion-solid interactions, ion milling, and nanofabrication.

Chemical Vapour Deposition: Thin Films & Oxidation

Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.