Wet Etching: Sacrificial Layers

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Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.

Fabrication extended: Deposition

Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.

Film Growth: Growth Modes and Crystal Structure

Explores growth modes in film growth and crystal structure determination based on materials used.

Catalyst Synthesis II: Deposition and Precipitation

Explores catalyst synthesis through deposition and precipitation, covering principles, applications, (co-)precipitation, zeolites, carbon supports, and perovskites.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Chemical Vapor Deposition: Processes and Applications

Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.

Sputtering: Plasma Formation and Thin Film Deposition

Covers sputtering, plasma creation, and thin film deposition processes.

Thin-Film Processing

Explores thin-film processing techniques, including CVD, ALD, and plasma interactions, emphasizing their advantages and applications.

Snow Processes at Snow-Atmosphere Interface

Explores processes at the snow-atmosphere interface and extreme snow falls in the Swiss Alps.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.