Scanning Electron Microscopy

This lecture covers the principles and applications of Scanning Electron Microscopy (SEM), including electron beam scanning, signal contrasts, resolution factors, and interaction volumes. It explains the role of secondary electrons, backscattered electrons, and various signals in image formation. The instructor discusses the effects of voltage acceleration, edge effects, and sample charging on SEM imaging. Additionally, it explores techniques to improve resolution, reduce artifacts, and enhance contrast in SEM images. The lecture also delves into the challenges of charge accumulation on insulating samples and the strategies to mitigate these effects.