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Explores self-sensing cantilevers in Scanning Probe Microscopy and the advantages of integrated sensor-actuator systems for high-speed data collection.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Celebrates Philippe Renaud's exceptional journey in microengineering, innovation, and education, showcasing his impact on research, education, and interdisciplinary collaborations.
