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Explores cleanroom basics and contamination issues in microfabrication processes, emphasizing the impact of contaminants on device performance and reliability.
Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
Explores the forces, tips, and probes used in Scanning Probe Microscopy, focusing on AFM principles, tip resolution limits, and cantilever probe fabrication.
