Micro/Nanomechanical Devices: Fabrication Techniques

About
Privacy
Disclaimer

Graph Chatbot

Related lectures (32)

Page 2 of 4

Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.

PVD 7: Other Techniques

Explores ion plating, MBE, and PLD techniques in thin film fabrication.

Lithography: General Concepts and Mask Fabrication

Covers lithography concepts, mask fabrication, UV lithography, and emerging techniques.

Thin Film Growth: Mechanisms and Applications

Explores thin film growth mechanisms, organic thin film considerations, deposition techniques, and patterning for electronic devices.

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Introduces MEMS, Cleanroom technology, thermal oxidation, vapor creation, and film formation principles.

Advanced Nanomanufacturing: Lithography & Self-Assembly

Delves into advanced nanomanufacturing techniques, including lithography and block copolymer self-assembly for precise device fabrication.

Chemical Vapour Deposition: Micro and Nanofabrication

Explores Chemical Vapour Deposition for micro and nanofabrication processes.

Deposition: Physical Vapor Deposition (PVD) Techniques

Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Thin-Film Processing: Removal and Deposition

Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.