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Lecture
Micro and Nanofabrication: Inspection and Metrology
Description
This lecture covers optical microscopy variations such as Bright Field, Dark Field, and Differential Interference Contrast, used for inspection and dimension measurement in Micro and Nanofabrication. It explains the basics of an optical microscope, the configuration, and the different modes of operation. The lecture also discusses the calibration of metrology tools, including the measurement of XY and Z dimensions, and the process of checking the results of micro and nanofabrication processes.
Official source
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