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Microfabrication Technologies
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Related lectures (32)
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Focused Beam Lithography: E-Beam Basics
Explores UV and DUV lithography, electron beam lithography basics, resist materials, and optics, comparing EBL with other lithography methods.
Dry Etching Techniques
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Micro/Nanomechanical Devices: Fabrication Techniques
Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.
Fabrication extended: Etching
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Electron Beam Lithography: Interactions and Resist Contrast
Explores electron-sample interactions and resist contrast in lithography for high-resolution fabrication.
Microcontact Printing: Nanometer Scale Lithography
Explores microcontact printing for nanometer scale lithography, biopatterning, and advanced nano-fabrication methods.
Lithography: Fabrication Extended
Explores lithography techniques in nanofabrication, focusing on EBL and NIL processes.
Laser Cutting and Additive Manufacturing
Explores laser cutting, additive manufacturing, polymerization mechanisms, and 3D metal printing processes.
Nano-Fabrication Methods Overview
Explores stencil lithography, a high-resolution direct patterning technique, and its applications on flexible substrates, dynamic stenciling, and biopatterning.
Nanofabrication: Techniques and Challenges
Explores nanofabrication techniques, challenges, and the use of silicon wafers.