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Lecture
Nano-Fabrication Methods Overview
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Lithography: Microfabrication Technologies
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.
Focused Beam Lithography: E-Beam Basics
Explores UV and DUV lithography, electron beam lithography basics, resist materials, and optics, comparing EBL with other lithography methods.
Scanning Probe Microscopy
Explores the principles and applications of Scanning Probe Microscopy techniques.
Stencil Lithography: Nanometer Scale Patterning
Explores stencil lithography for nanometer scale patterning and its challenges.
Microcontact Printing: Nanometer Scale Lithography
Explores microcontact printing for nanometer scale lithography, biopatterning, and advanced nano-fabrication methods.
Nanotechnology: Fabrication and Imaging
Covers advanced lithography, nanoscale imaging, and fabrication techniques in nanotechnology.
Scanning Probe Microscopy: Basics and Applications
Explores scanning probe microscopy fundamentals, tip types, and AFM modes for nanoscale imaging and manipulation.
Lithography: Fabrication Extended
Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.
AFM Tips and Cantilevers Fabrication
Explores the fabrication of AFM tips and cantilevers, including tip sharpening, thermal oxidation, and the use of carbon nanotubes as probes.
Microfabrication Technologies
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.