Lecture

Advanced SEM Technologies and Examples

In course

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Description

This lecture covers advanced scanning electron microscope (SEM) technologies, including low voltage imaging, high-resolution SEM, and examples of SEM applications. Topics include in-column detectors, plasma cleaning, polishing techniques, and the latest generation environmental SEM. The lecture also discusses the use of field emission guns, monochromators, and beam boosters for high-resolution imaging. Additionally, it explores the analytical capabilities of SEM, such as energy-dispersive X-ray (EDX) detectors and electron backscatter diffraction (EBSD) detectors. Various examples demonstrate the practical applications of SEM in materials science and nanotechnology.

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_l2uomsb0

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