Advanced SEM Technologies and Examples

This lecture covers the latest generation of scanning electron microscopy (SEM) technologies, including low voltage, high resolution imaging, field emission gun monochromators, and various detectors. It explores lens designs, beam boosters, and beam deceleration techniques, as well as the observation of non-metallic samples with reduced beam damage. The presentation also delves into immersion lenses, in-lens and semi-in-lens configurations, and the detection of secondary electrons and backscattered electrons. The instructor showcases examples of contrast reversal at low voltages, the effects of charging, and the importance of specimen preparation for analytical SEM. The lecture concludes with a discussion on the analytical capabilities of SEM, such as energy-dispersive X-ray spectroscopy (EDX) and electron backscatter diffraction (EBSD).