Wet Etching: Glass and Silicon

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Technologies: BioMEMS Overview

Covers BioMEMS technologies, materials, processes, and PDMS chemistry.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Dry Etching of Organic and Metal Films

Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Microfabrication Technologies

Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Photonic Crystals: Fabrication Techniques

Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.