Lithography: General Concepts and Mask Fabrication

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Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Nanoimprint Lithography: Emerging Nanopatterning Methods

Explores lithography basics, emerging nanopatterning methods, and applications in high-end microelectronic chips.

Lithography: Scanning Probe Lithography

Delves into scanning probe lithography, exploring its principles and potential applications in nano-fabrication.

Nanoimprint Lithography: Basics and Applications

Covers the basics of nanoimprint lithography and its applications in high-end microelectronic chips.

Integrated Circuits: Evolution and Fabrication

Explores the evolution of integrated circuits, from transistors to CMOS technology, highlighting key historical milestones.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

Mask Fabrication Process

Demonstrates the practical steps involved in mask fabrication for UV lithography.

Scanning Probe Lithography: Nanoscale Applications

Explores Scanning Probe Lithography techniques in nanotechnology, including DPN and data storage technologies.

Clip Mask Fabrication

Showcases the practical steps of fabricating a mask for UV lithography.

Lithography: Photoresist Sensitivity and Modulation Transfer Function

Discusses photoresist properties in lithography resolution and the role of the optical transfer function.