FIB Applications: Nanofabrication and Failure Analysis

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Covers the ALIS He ion source and its application in high resolution microscopy, providing remarkable surface detail and material contrast.

Physical Vapor Deposition: Basics and Applications

Explores Physical Vapor Deposition techniques, including vapor creation and flux towards the substrate in micro and nanofabrication.

Sputtering in CMi

Covers the operation of a cluster sputtering tool and the process of changing sputter targets.

Introduction and Interaction with Radiation-Matter

Introduces electron microscopy, covering practical organization, sample preparation, radiation-matter interaction, and detector mechanisms.

Microscopy: General Aspects and Techniques

Covers general aspects and techniques of microscopy, emphasizing resolution importance and exploring scanning tunneling and atomic force microscopy.

Microscopy at Nanoscale: Techniques and Applications

Covers resolution enhancement in optical microscopy, confocal imaging, and fluorescent labelling, exploring the history and techniques of scanning probe microscopy.

Sputtering: Film Growth and Control Parameters

Covers the sputtering process, parameters influencing film quality, and advantages over thermal evaporation.

Radiation-Matter Interaction: Electron Microscopy Introduction

Covers the principles and techniques of electron microscopy, focusing on the interaction between radiation and matter.

Thin-Film Processing: Deposition Techniques

Explores thin-film processing techniques, focusing on chemical vapor deposition advantages, growth modes, ALD, plasma role, and discharge initiation.

Chemical Vapor Deposition: Oxide Formation and ALD

Explores CVD processes for oxide formation and ALD in micro and nanofabrication.