Lecture

Plasma Generation and Ion Sheath in Etching

Related lectures (34)
Plasma State: Properties and Effects
Covers the definition and properties of plasma, including ionization and collective effects.
Fabrication extended: Etching
Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Ion Beam EtchingMOOC: Micro and Nanofabrication (MEMS)
Introduces ion beam etchers, combining physical sputtering with chemical activity.
Industrial Plasmas: Sheath Formation and Plasma Etching
Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.
Photonic Crystals: Fabrication Techniques
Delves into the fabrication techniques of photonic crystals, inspired by natural structures like butterfly wings and opal stones.
Industrial Plasmas: Applications and Chemistry
Explores industrial plasma applications, breakdown phenomena, and plasma chemistry challenges, including gas-phase reactions and transport processes.
Josephson Inductance and Transmon Qubits
Covers Josephson inductance, Cooper pair box, Transmon qubits, and their practical applications.
Glass Microfabrication by Wet Etching
Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.
Sheaths and Plasma EtchingMOOC: Plasma Physics: Introduction
Explores sheaths, ion flux, Bohm criterion, and plasma etching concepts.
Optimization of Neuroprosthetic Systems
Explores the optimization of neuroprosthetic systems, including sensory feedback restoration and neural stimulation strategies.

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.