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Lecture
Lithography: Methods and Importance
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Scanning Probe Lithography: Nanometer Scale Patterning Techniques
Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.
Lithography: Alternative Patterning Methods
Explores alternative lithography methods like nanoimprint and stencil lithography for nanowire fabrication and exotic surface patterning.
Focused Beam Lithography: E-Beam Basics
Explores UV and DUV lithography, electron beam lithography basics, resist materials, and optics, comparing EBL with other lithography methods.
Lithography: Tools and Techniques
Covers the principles and tools used in lithography for micro and nanofabrication.
Lithography: Fabrication Extended
Covers main issues in lithography fabrication, exposure considerations, development challenges, and resolution limits.
Lithography: Fabrication Extended
Explores lithography techniques in nanofabrication, focusing on EBL and NIL processes.
Nanoimprint Lithography: Emerging Nanopatterning Methods
Explores lithography basics, emerging nanopatterning methods, and applications in high-end microelectronic chips.
Micro and Nanofabrication for Optomechanics
Explores the importance of micro- and nanofabrication in optomechanics, covering key processes and challenges in device fabrication.
AFM Tips and Cantilevers Fabrication
Explores the fabrication of AFM tips and cantilevers, including tip sharpening, thermal oxidation, and the use of carbon nanotubes as probes.
Scanning Probe Microscopy: Basics and Applications
Explores scanning probe microscopy fundamentals, tip types, and AFM modes for nanoscale imaging and manipulation.