SEM basics

This lecture covers the basics of Scanning Electron Microscopy (SEM), including the setup, electron sources, lenses, vacuum system, and detection system. It explains how SEM works, the signals it uses, and the challenges such as beam damage, contamination, and charging. The lecture also discusses the effect of sample tilt on Backscattered Electron (BSE) yield, the importance of detector position, and the strategies to mitigate charging issues. Additionally, it explores the impact of beam energy on SEM signals and the significance of understanding the interaction volume for image formation.