Focused Ion Beam: Basics

This lecture introduces the principles and applications of Focused Ion Beam (FIB) microscopy, covering topics such as ion sources, optics, sample interaction, TEM sample preparation, and FIB Nanotomography. It explains the advantages of using ions over electrons, the ion column structure, and why Gallium is commonly used. The lecture also discusses the different operating modes of FIB, including imaging, milling, deposition, and etching, as well as the effects of ion-solid interactions. Additionally, it explores the concept of channeling contrast in FIB microscopy.